| LEC # | TOPICS | |
|---|---|---|
| 1 | Overview of Semiconductor Manufacturing (PDF) | |
| Statistical Process Control | ||
| 2 | Statistics Review: Distributions (PDF) | |
| 3 | Statistics Review: Estimation (PDF) | |
| 4 | Hypothesis Tests and Control Chart Introduction (PDF) | |
| 5 | Control Charts | |
| 6 | Advanced Control Charts, Nested Variance (PDF) | |
| Experimental Design | ||
| 7 | Analysis and Design of Experiments (PDF) | |
| 8 | ANOVA, Variance Component Estimation | |
| 9 | MANOVA, Factorial Experiments (PDF) Quiz #1 | |
| Yield and Yield Learning | ||
| 10 | Design of Experiments and Response Surface Modeling (PDF) | |
| 11 | RSM and Regression (PDF) (PDF) | |
| 12 | Yield Management and Modeling | |
| 13 | Yield Modeling | |
| Advanced Process Control | ||
| 14 | Spatial Modeling | |
| 15 | Sensors and Signals (PDF) | |
| 16 | PCA and Time Series | |
| 17 | Run by Run Control (PDF) | |
| 18 | Real Time Control, Scheduling | |
| Factory Operation and Design | ||
| 19 | Scheduling (PDF) Quiz #2 | |
| 20 | Planning (PDF) | |
| 21 | Factory Design and Efficiency (PDF) | |
