Course Meeting Times
Lectures: 2 sessions / week, 1.5 hours / session
Course Objectives
- Thorough understanding of the unit process steps
- Exposure to modern CMOS process flow and integration issues
- Introduction to the impact of processing on device electrical performance
- Awareness of epitaxial growth, characterization, and processing of SiGe
- Basic understanding of the SUPREM IV process simulator
Note: This field changes dramatically every few years. Keeping up with the latest developments is a continuous process.
Who should take this Class
Anyone considering graduate research or a career in microelectronics or microfabrication.
Prerequisites
Exposure to basic concepts covered in 6.152J helpful but not required.
Required Text
Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 0130850373.
Grading
| ACTIVITIES | PERCENTAGEs |
|---|---|
| Homework (5 Homework Assignments) | 50% |
| Term Project | 50% |
Term Project
Paper: maximum length of 20 pages, or
In-Class Presentation (with handouts): 17 minutes, plus 3 minutes for questions/discussion.