Electron Microprobe Analysis

Photo of an electron microprobe.

The Electron Microprobe at MIT. (Image by Dr. Nilanjan Chatterjee.)


MIT Course Number


As Taught In

January IAP 2012



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Course Description

Course Features

Course Highlights

This lab-oriented course introduces the student to the subject of X-ray spectrometry and micrometer-scale chemical quantitative analysis of solid samples through an intensive series of hands-on laboratory exercises that use the electron microprobe.

Course Description

The electron microprobe provides a complete micrometer-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic X-rays excited by an electron beam incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis through wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and scanning electron imaging with back-scattered electron (BSE), secondary electron (SE), X-ray using WDS or EDS (elemental mapping), and cathodoluminescence (CL). Lab sessions involve hands-on use of the JEOL JXA-8200 Superprobe.

Other Versions

Related Content

Nilanjan Chatterjee. 12.141 Electron Microprobe Analysis. January IAP 2012. Massachusetts Institute of Technology: MIT OpenCourseWare, https://ocw.mit.edu. License: Creative Commons BY-NC-SA.

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